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org in February 2007
The function of the specifications is to establish desired standards of quality
1 mm厚のガラス基板の水平搬送や保管に使用するカセットについて規定する。
SEMI E63-1104 (technical revision)
SEMI E53 — Event Reporting
D02400 - SEMI D24 - FPD用ガラス基板の仕様 StdPbc-0218 org in February 2007NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Flat Panel Display Factory Automation Global Technical Committee2006516global Audits and Reviews Subcommittee20066www. semi. org20002 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain